PLASMA ETCHING 
Anti-reflective films incorporate surface nanostructures / New technology is based on the “moth eye” principle / Continuous process for anti-reflecting polymers
The Fraunhofer Institute for Electron Beam and Plasma Technology (Fraunhofer FEP, Dresden / Germany; www.fep.fraunhofer.de) and the Fraunhofer Institu...Published on 02.05.2012
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